Thin Film Desposition

At Micronit, we offer a variety of applications of thin-film deposition on glass and silicon substrates. Whether creating functional components for devices or using a thin film as a hard mask for etching processes, our team is ready to provide the right solution for your specific needs. 

Physical Vapor Desposition (PVD) 

Physical Vapor Deposition (PVD) includes technologies in which material is physically transported from a source to the substrate. The machinery required for this type of deposit consists of a vacuum chamber and a form of energy to dislocate material from the source into a vapor. Mainly the type of energy which is used in such a system characterizes the deposition and properties of the resulting thin film.  

Micronit can provide in deposition technologies such as e-beam evaporation, magnetron sputtering and Pulsed Laser Deposition to thin films of thickness of up to hundreds of nanometers consisting of materials including Cr, Au, Ni, Al, Pt, Pd, Ti, Ta, Cu, SiN, SiO2, ITO and many more. Post processing in terms of annealing, characterization and patterning are within the possibilities we can offer.  

Chemical Vapor Desposition (CVD) 

In addition, Micronit offers various options in Chemical Vapor Deposition (CVD). Here, the thin film deposition is achieved from a gas in a vacuum environment with the assistance of temperature or plasma. The reactive species in the gas phase introduced in the chamber reacts with all surfaces exposed surfaces. We offer Plasma Enhanced Chemical Vapor Deposition (PECVD) and Low Pressure Chemical Vapour Deposition (LPCVD), in which thin films are deposited using plasma or heat energy in a low-pressure environment. Thin film materials to be deposited are silicon dioxide (PECVD, TEOS, LTO or TOX), silicon nitride (PECVD or LPCVD), Polysilicon (LPCVD) and combinations.   

Getting Started 

At Micronit, we specialize in assisting our customers from concept to manufacturing. Don’t hesitate to contact us to find out what thin film we can provide you with! Want to learn more about our technical capabilities? Download our complete overview of capabilities.

Does your project need film deposition, surface functionalization or activation solutions? Get in touch with our experts!