Lithography: Techniques and Applications

At Micronit, we provide a range of lithography techniques for microfabrication. Whether structuring glass or silicon wafers, our lithography processes are at the heart of our manufacturing process. 

Photolithography 

Photolithography is a fundamental process in microfabrication. It plays a key role in defining patterns on semiconductor substrates, such as silicon wafers or glass, enabling selectivity in further processing steps.  Hence, lithography is a critical step in creating integrated circuits, microprocessors, and other semiconductors and MEMS devices.  

The first step is preparation of the substrate surface, to obtain a clean and chemically compatible surface for the UV-light responsive polymer (photoresist) layer to be coated. Next, the photoresist is coated to a uniform layer by spinning or spraying (or a combination), followed by a baking step to evaporate the solvents from the photoresist to form a solid layer.  

The substrate with the photoresist layer is loaded into a mask alignment system, in which substrate and a photomask (a glass plate with a patterned chrome film) are aligned in relative sense. Once aligned, the photoresist layer is exposed by UV-light through the photomask, hereby transferring the photomask pattern onto the photoresist layer. Afterwards the resist is ready for wet or dry etching processing, or even deposition using lift-off technology.  

Micronit offers lithography on up to 200 mm substrates, (glass, silicon or alternative), with multiple positive and negative tone resists. Furthermore, the application of the photoresist to the substrate can be done by spin coating as well as spray coating technology. 

Graphical illustration showing the essence of the lithography process, including photoresist application, exposure through a photomask and development towards a substrate scale patterned layer, which allows for further selective processing.  

Getting started 

At Micronit, we specialize in assisting our customers from concept to manufacturing. Are you interested in what a collaboration will look like? Take a look at our route to success! Want to learn more about our technical capabilities? Download our complete overview of capabilities.

Contact us and find out how Micronit can be your partner in precision manufacturing!